1) Hermetically sealed module (Two Workstation) : - Single sided and Double(4 port) length: 2,200(L) X 890(H) X 760mm(D).
2) Antechamber :
- Size : 380 dia. x 500 mm length, High vacuum design, O-ring sealed.
3) Mini Antechamber : - 150mm (dia.) x 290mm (Length)
4) Automatic Pressure Controller (Color Touch Panel) : - 5" to 5" W.C., Limits easily adjustable.
5) Dri Trap (Purification System) :
6) Moisture Analyzer : - Display range: 0-1,000ppm.
7) Oxygen Analyzer : - Measurement range: 0.001ppm ？ 100%.
8) Cold Storage Box : - Temperature Range : Room temp. to ？35℃
9) Solvent Trap (Chemical Type) : 1 set 10) Vacuum Oven : - Max. temp. : 200℃, Using temp. : 150℃
11) Electrical Feedthru : 12) N2 Safety Interlock System 13) N2 Hazard System 14) Butyl Rubber Glove : 2 Pair