• Materials
- 내식/내산성이우수하고 고온강도가 큰 STS316, PTFE로 구성
- 10-3torr의고진공TEST고성능 정보전자소재 공정연구개발에 활용
• Gear Pump 3set(1 feed+2receivers) : 0.37kW, 50L/hr(High pressure & High vacuum gear pump)
• Design pressure jacket: 5.0bar 이상, Design temperature jacket : 300℃ 이상
• Wiper : Number of wiper stands(three), Self cleaning characteristic of wiper system　
• 1stCold Trap　
- Operating Temperature(-30℃이상), Chamber volume(10Lt),Cooling capacity(2.8kw/-20℃)
• 2ndCold Trap　
- Operating Temperature(-100℃이상), Chamber volume(4Lt),Power(220V, 60Hz, 1P)
• Surface : Evaporator(0.3m2), Condenser(0.38m2)
• Protection class Ex-components : Ex d II C T4 (내압방폭구조, KOSHA인증)
• Dedicated equipment
- TCUsystem
1. For main body : Operating temperature(50/+300℃),Heating capacity(7.5kw)
2. For Internal condenser : Operating temperature(-40/+100℃),Cooling capacity(4.5kw/-20℃)
3. For 1stCold trap: Operating temperature(-40/+100℃),Cooling capacity(2.8kw/-20℃)
- Vacuum & Control System
1. Booster Pump: Nominal displacement(630m3/hr), Max. pressure difference(53mbar), Motor(2.2kw), Nominal Motor speed(3600rpm),Type of drive(Direct coupling)
2. Oil Rotary Vane Vacuum Pump : Nominal displacement(144m3/hr), Motor(3.7kw) Ultimate pressure with gas ballast(5x10-3torr), Nominal Motor speed(1700rpm), Type of drive(Direct coupling)